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COMET 2 station pitch changing

COMET 2 station pitch changing

The COMET 2 station Pitch Changing allows the transfer of a batch of wafers 3″ to 8″, from cassette to cassette OR from cassette to boat, with pitch change from 4.76m to 8.35mm. The batch can contain from 1 to 25 wafers to be transferred.

Customized to meet your different cassettes, boats and wafers specifications needs, the COMET 2 station Pitch Changing is fast, clean, reliable and accurate, and it saves valuable space thanks to its small footprint.

Simple to use and easy to maintain, the COMET 2 station Pitch Changing is a one button system operation, fully automatic, free hand operating, set up and controlled manualy directly from the front panel keyboard. All electronic parts are compatible with all COMET machines.

Moreover , the COMET 2 station Pitch Changing is compatible with SECS-GEM communication, SECSI or HSMS protocol, thanks to its R2S232 and TCP/IP communication port available on the rear side of the machine, and can be integrated in your process line (OEM customer), with Robotic arm and elevator.

Specifications:

  • CE certification
  • SEMI Standard
  • Class 1

 

Performance

  • Total cycle time: < 1 mn
  • Uptime: 99.8%
  • MTBF: > 4000hrs
  • MTBA: 750 hrs
  • MTTR: < 1hr
  • MTTA: 0.005 hr
  • Breakage rate: 1 for 5.105

 

Facilities and Requirements:

  • Width: 499mm ; Depth: 419mm ; Height: 735mm
  • Weight: 47 kg
  • Power: 100-240 VAC 75 watts
  • Frequency: 50-60 Hz
  • Full Load Amps: 1.2-0.6 A
  • No need for compressed air

Options

  • SECS/GEM : Machine includes SECS/GEM communication:  RS232 – E4 SECS I and Ethernet – E37 HSMS-SS (TCP/IP)
  • ESD: Electrostatic dissipation of the wafers thanks to ESD material of the parts touching wafers (combs)
  • Flat /Notch aligner: Integrated Flat or Notch aligner system.
  • Carrier BC Tag Reader: Fixed barcode reader device
  • Carrier RFID Tag Reader: Fixed RFID tag reader device
  • Tower Light: Three color tower light (green, orange, red)
  • Selectable notch/flat position: The position of notches/flat after alignment can be set thanks to a switch
  • Keyboard lock: Manual mode access are locked manually thanks to a key

Main skills

  • Batch wafer transfer from cassette to cassette, OR from cassette to boat, with pitch change from 4.76m to 8.35mm.
  • Wafer size  6″ and  8″
  • SECS-GEM communication (SECS I or HSMS)
  • Customized according customer cassettes/ boats and wafers
  • Small footprint
  • Fast, clean, reliable and accurat

 

Standard features

  • Peek material for pushers, retainers and boat adaptors
  • LCD display indicating all cycle steps.
  • IR heat sensor
  • Double cassette/boat sensors
  • Carrier correctly positioned (mechanical)
  • Wafer presence detection into cassette/boat
  • Current limit on all motors
  • Power “off” security
  • Open frame, designed for a vertical laminar flow
  • Automatic home position
  • Historical data recorded (error messages data time)
  • Clean room color paper documentation

 

Software flexibility

  • Transfer parameters adjustable to reduce cycle time
  • Security sensor management

Related products

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